![]() These processes result in constituent materials with a lower Young’s modulus and larger maximum allowable strain than silicon, and therefore allow larger deflection. The review results indicate that, even though the silicon process remains dominant, great progress has been made in the development of polymer-related and composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, and the CNT frameworking. Furthermore, the features of each process were collected into tables to facilitate the reference of readers, and the guidelines for process selection were discussed. To this end, the literature surveyed was classified and statistically analyzed, and representative processes were summarized individually to reflect the state of the art of CMM manufacturing. ![]() In this paper, the realization of CMMs is reviewed, aiming to provide help to mechanical designers to quickly find the proper realization method for their CMM designs. Recently, some novel manufacturing processes have emerged but are not well known by the community. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflections. ![]() Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices.
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